由於光電技術蓬勃發展，各種電子產品朝向微小化發展，諸如光碟機、數位相機等。為達成微小化、輕量化之目標，需依靠微元件的進展，如微透鏡陣列、繞射光學元件等，而其中微透鏡陣列更是應用最廣泛的光學元件之ㄧ，其廣泛應用在顯示元件、光學感測、無線通訊與光纖通訊等。傳統製造技術已逐漸無法應付精密微結構元件之生產，因此亟需開發出精密、快速且大量的微結構元件複製成型技術。
本研究開發創新壓印技術，結合奈米粉體壓印技術及陣列式UV光固化技術，利用奈米粉體作為傳達壓印力量之方法，並融合軟微影、光固化阻劑及氣體輔助施壓技術等技術特點，研究於製作微透鏡陣列之製程技術開發，致使奈米壓印的應用與技術更趨成熟。研究結果顯示，具陣列微孔洞SUS 304不銹鋼片輔以氣體輔助微熱壓可順利製作原始微透鏡陣列模具，PDMS並可精確的翻鑄複製出互補外形之微透鏡陣列結構，並搭配本研究開發之氣體輔助奈米粉體壓印技術均勻施壓下，配合陣列UV均勻曝光固化，將可有效進行微透鏡之完整成型，同時與基材表面達到完美接觸，可大幅提昇有效壓印面積及提高轉印重現性；而且PDMS軟模製作容易、翻鑄時間短，可有效降低成本，加上其具有表面自由能低，壓印時不易與阻劑沾黏等特性，搭配氣體輔助奈米粉體壓印確實是微結構製程上一大優勢。

Since the electro-optic technology is developing vigorously, the design of electronic products is becoming more compact, such as DVD players and digital cameras. In order to achieve smaller size and lighter weight, micro elements need to be developed, such as microlens arrays and diffractive optical elements. Microlens arrays are among the most widely used optical components, which are used in display components, optical sensors, wireless communication, and optical fiber communication. Conventional production technologies can no longer meet the demand for producing precise micro elements, thus, a replication molding technology for mass production of precise micro components is urgently needed.
This study developed creative imprinting technology, combining nano-imprint lithography and array-type UV-curing technology. It used nanopowders as the method to transmit imprint force, and integrated technical features, such as soft lithography, light-curing resistant and gas-assisted imprint technology, in order to study the development of technological processes of micro-lens array manufacturing, and mature the application and technology of nano-imprinting. According to research results, SUS 304 stainless steel sheet with a micro-hole array could be smoothly fabricated into an original micro-lens array mold upon gas-assisted micro-hot embossing. At the same time, a micro-lens array structure with a complementary external form could be precisely remolded and reproduced by PDMS. Complete molding of micro-lens could be effectively achieved by combining imprints of gas-assisted lithography developed in this study, and even UV-NIL. The effective imprinting area and reproducibility of transfer printing could be greatly improved when a micro-lens contacts perfectly with a substrate surface. Moreover, since PDMS soft molds have short remolding times, and are easily feathered during manufacturing, production costs could be effectively reduced through features such as, low surface free energy, resistant to adhering to the mold during imprinting, and collocation of gas-assisted nanopowder imprinting of micro-structural processes.

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