本論文主要分為兩個部分，第一部分為氧化鋅奈米桿之水熱法製備，並以之作為NO2氣體感測元件；第二部分探討氧化鋅奈米桿晶格中的缺陷濃度，及其對導電性及氨氣感測之影響。
藉由醋酸鋅及HMTA前驅物，透過水熱法成長之ZnO奈米桿，與透過噴霧裂解法製備的氧化鋅薄膜相較，擁有較高的體表面積比，因此對NO2感測之靈敏度較高且操作溫度也較低。另外，感測靈敏度也隨著氧化鋅奈米桿的長度而提高，其中以前趨物濃度為0.02 M，水熱溫度為110℃，成長三小時的氧化鋅奈米桿，其表面積最大，感測靈敏度最高，可偵測低於0.3 ppm 的NO2氣體。
氧化鋅奈米桿擁有兩個螢光光譜波峰，分別為~380 nm (可見光放光)以及450~700 nm(缺陷放光)，其中後者的強度越強，表示氧缺陷濃度越高。這些缺陷經熱處理後明顯下降，尤其經由氮氣退火後的奈米桿缺陷濃度最低，對氨氣的感測靈敏度也隨著下降。但利用氧氣電漿處理後，可提高表面吸附之氧離子及氧缺陷濃度，因而提高氧化鋅奈米桿的感測靈敏度，其中以氧氣電漿改質五分鐘的氧化鋅奈米桿，其表面氧離子和缺陷濃度最高，氨氣感測靈敏度最大，可偵測低於0.4 ppm的氨氣。

This thesis consists of two parts. The first part describes the preparation of ZnO nanorods by a hydrothermal method, and the application of the ZnO nanorods as the NO2 gas sensor. The second part investigates the defects in the ZnO nanorod crystal and the effect of defect concentration on the conductivity and the NH3 sensing property on the ZnO nanorod.
Vertically aligned ZnO nanorod arrays are prepared by a hydrothermal method with zinc acetate and hexamethylenetetramine as precursors. The NO2 sensor based on the nanorod arrays shows a higher sensitivity and lower operating temperature as compared to the sensor based on the ZnO film prepared by ultrasonic spray pyrolysis. The enhanced sensitivity is attributed to the higher aspect ratio of the nanorod structure. The sensitivity of the sensor increases with the length of the ZnO nanorod. The ZnO nanorods grown with 0.02 M precursor concentration at 110℃ for 3h show the largest aspect ratio, the highest sensitivity, and can detect NO2 gas at the 0.3 ppm level.
ZnO nanorods show two peaks in the PL spectrum, the UV emission at ~380 nm and the visible emission at 450~700 nm. The latter is also called the defect emission, since its intensity increases with the concentration of oxygen defects. After an annealing in N2, defects are suppressed, which causes a decrease in the sensitivity towards NH3. On the other hand, an O2 plasma treatment can enhance the NH3 sensitivity due to the increase in surface adsorbed oxygen ions and oxgen defects. After treatment in O2 plasma for 5 minutes, the ZnO nanorods show the highest defect concentration and the highest NH3 sensitivity, with the detection limit lower than the 0.4 ppm level.

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