本研究將探討透輝石相玻璃陶瓷(CaMgSi2O6) 材料系統，以開發出具低介電常數 (low dielectric constant, k)、高品質因子值(high quality factor, Qxf) 和具低共振溫度頻率係數(Temperature coefficient of the resonance frequency, τf) 之微波介電陶瓷材料，且期望此材料系統可於氮氣下之較低工作溫度(≦1000oC) 和銅電極進行燒結。
首先將先探討透輝石相玻璃陶瓷以不同粒徑氧化鋯(ZrO2) 做為成核劑，並分別經由大氣或氮氣二階段式熱處理後，其對於透輝石相玻璃陶瓷之結晶度和微波介電特性之影響。由其SEM/BEI、Rietveld 精算結晶度以及結晶動力學之分析結果可知，當透輝石相玻璃陶瓷以奈米粒徑ZrO2 做為成核劑相較於以微米粒徑ZrO2 做為成核劑時的成核數目明顯來得多，且其透輝石相的結晶度會提升3.40 wt%，結晶活化能值(Ea) 也會由548 kJ/mol 降低至497 kJ/mol，同時由其經大氣下960oC/2hrs 熱處理後之微波介電特性可發現，其因仍為透輝石相玻璃陶瓷與t-ZrO2 相為主，而並無其他二次相產生，因此其介電常數及τf 值乃介於一定範圍之間(k=7~8，τf=-60~-80 ppm/oC)，且因透輝石相玻璃陶瓷材料系統之成核數目增加，會因較易產生結晶反應，而有助於其結晶度之提升，因此品質因子值(Qxf) 也會由9,391 GHz 提升至11,127 GHz。
另外，為了改善其仍偏高之τf 值(-79ppm/oC)，因此將再利用氮氣二階段式熱處理方式，並同時添加入正τf 值之CaTiO3 陶瓷粉體，以期望能有效改善τf 值。其微波介電特性結果顯示，介電常數介於8~10 之間，且因透輝石相玻璃陶瓷中所添加之微米粒徑ZrO2 改為奈米粒徑之ZrO2 做為成核劑時，因其結晶度之提升，因此有助於其品質因子值(Qxf) 由3,779 GHz 提升至5,136 GHz，同時τf 值也有所改善，由-45 ppm/oC 改善至-15 ppm/oC。但在此部分之氮氣二階段式熱處理過程中，若透輝石相玻璃陶瓷之預結晶成核溫度偏差±5oC 時，則其結晶性會大幅下降，此會使其微波介電特性大幅下降，所以在製程上較為繁瑣且需要非常謹慎。
因此，本實驗將在透輝石相玻璃陶瓷中以奈米粒徑ZrO2 做為成核劑，並直接添加陶瓷粉體後，直接進行氮氣下960oC/2hr 之共燒熱處理，以期望簡化製程和得到更優良之微波介電特性。由其XRD 之分析結果可知，陶瓷體可穩定存在於透輝石相玻璃陶瓷中。同時，本實驗也推論，其亦可誘發透輝石相玻璃陶瓷之結晶性的提升。另外，本實驗也經由計算陶瓷的視燒結活化能後推論，陶瓷體是否可穩定存在於透輝石相玻璃陶瓷中的影響因素，與陶瓷的視燒結活化能大小無關。最後本實驗也發現，當透輝石相玻璃陶瓷同時添加陶瓷粉體經氮氣下960oC/2hr 之燒結熱處理後，可得到一組最佳之微波介電特性為k=9.3，Qxf=7,709 GHz，τf=-0.05 ppm/oC。

In this study, diopside glass-ceramics (CaMgSi2O6) materials sintered in reduced atmosphere, which required a low dielectric constant (k), high quality factor (Q×f) and a near zero temperature coefficient of the resonance frequency (τf) as a microwave dielectric ceramic materials, were studied.
Experimental results reveal that different size of zirconia nucleating agents added into MgO-CaO-2SiO2 system show not only increase of nucleating agents but also enhancement of crystallization in diopside glass-ceramics. Microstructural features demonstrated that large of ZrO2 nucleating agents precipitate in the matrix due to addition of nano particle size in the diopside system. Moreover, Rietveld refinement results show that specimens with nanometer ZrO2 addition reveal low amorphous content (29.33 wt%) than specimens added with micrometer ZrO2 (33.01 wt%), and activation energy of crystallization also decrease from 548 kJ/mol to 497 kJ/mol, indicating that nano nucleating agents added into diopside glass-ceramic could increase the crystallization. Therefore, quality factors increase from 9,391 GHz to 11,127 GHz due to high crystallization.
Furthermore, diopside glass-ceramics added with appropriate ceramics and sintered in reduced atmosphere were also investigated. The appropriate ceramics reveal high Qxf and high positive τf, respectively. Experimental results reveal that diopside glass-ceramics added with appropriate ceramics show that appropriate ceramics addition would induce the high reactive crystallization in CaMgSi2O6 glass-ceramics. Therefore, diopside glass-ceramics added with appropriate ceramics sintered at 960oC in reduced atmosphere reveal k=9.3，Qxf=7,709 GHz and f=-0.05 ppm/oC application in LTCC process.

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