研究生: |
陳智鈞 Chih-Chun Chen |
---|---|
論文名稱: |
開發一適用於高壓下微型過濾晶片 The development of a microfiltration chip in an high operation pressure environment |
指導教授: |
陳品銓
Pin-Chuan Chen |
口試委員: |
董奕鐘
Yi-Chung Tung 王孟菊 Meng-Jiy Wang 吳夢楚 Meng-chu Wu |
學位類別: |
碩士 Master |
系所名稱: |
工程學院 - 機械工程系 Department of Mechanical Engineering |
論文出版年: | 2016 |
畢業學年度: | 104 |
語文別: | 中文 |
論文頁數: | 109 |
中文關鍵詞: | 微型過濾晶片 、利用環形結構增強晶片結合強度 、螺旋型流道 、黏合強度。 |
外文關鍵詞: | Increase the bonding strength by ring structure, Spiral microchannel. |
相關次數: | 點閱:193 下載:2 |
分享至: |
查詢本校圖書館目錄 查詢臺灣博碩士論文知識加值系統 勘誤回報 |
本研究之主要目的為開發一微型過濾晶片,可以適用在低壓及高壓的操作環境中,整合於晶片中之濾膜為商用濾膜,擁有成本低廉、易於取得的優點,然而此種濾膜材質為與晶片基材不同,在晶片封裝時屬於異質黏合,製程較為複雜。本研究以PMMA作為晶片材料並提出環形結構晶片設計,配合UV光固化膠黏合製程進行黏合,改善橫向洩漏的問題及提升晶片黏合強度;並以螺旋型流道幾何改善檢體於晶片內流動情況,降低檢體流動不順的現象。由於過濾晶片應用領域廣泛,高壓應用的部分,實驗將以黏度較高的矽油做為檢體進行過濾壓力量測,並對於不同流道尺寸之晶片進行黏合強度測試,並分析其影響;低壓應用則以人類全血作為檢體並分析流量、濾膜孔徑、血細胞比容對於血漿與血細胞的分離效率之影響。
Integration a filter into a microfluidic chip with the benefit from the easily selecting of the pore size due to the availability of the market was approached and reported from various studies. One of the major drawbacks of this approach is the leakage between the filter and the polymeric microfluidic chip/microchannel therefore a novel assembly approach to create a microfluidic chip with embedding the filter for sample separation without the leakage was conducted in this study The microchannel was fabricated on the PMMA substrates and the polycarbonate-based filter was sandwiched between PMMA substrates. The bonding between the PMMA substrates was based on UV glue, the UV glue was injected into a designed ring structure around the filter to prevent the leakage across the edge of the filter. Spiral microchannel geometry was designed to improve the flow situation in the flow channel, reducing ineffective filtration area. Several microfluidic chips with various pore size filters were fabricated for experiments. In order to test the functionality of the fabricated chip, various experiments including the bonding strength test, filtration pressure measurement and blood separation experiment were conducted.
[1] S. C. Terry, J. H. Jerman, J. B. Angell, "A gas chromatographic air analyzer fabricated on a silicon wafer," IEEE Trans. Electron Devices 26, pp. 1880-1886, 1979.
[2] C. T. Wittwer, G. C. Fillmore, D. J. Garling, "Minimizing the time required for DNA amplification by efficient heat transfer to small samples," Analytical Biochemistry 186, pp. 328–331, 1990.
[3] C. T. Wittwer, D. J. Garling, "Rapid cycle DNA amplification: time and temperature optimization," BioTechniques 10, pp. 76–83, 1991.
[4] Lab-on-Chip.gene-quantification.info.Available: http://www.gene-quantification.de/lab-on-chip.html
[5] G. M. Whitesides, "The origins and the future of microfluidics," Nature 442, pp. 368-373, 2006.
[6] D. J. Beebe, G. A. Mensing, G. M. Walker, "Physics and application of microfluidics in biology," Annu. Rev. Biomed. Eng 4, pp. 261-286, 2002.
[7] J. E. Drewes, B. Christopher, O. Matthew, X. Pei, T. U. Kim, A. Gary, "Rejection of wastewater-derived micropollutants in high-pressure membrane applications leading to indirect potable reuse," Environmental Progress 24, pp. 400-409, 2005.
[8] K. Aran, A. Fok, L. A. Sasso, N. Kamdar, Y. Guan, Q. Sun, A. Ündar, J. D. Zahn, "Microfiltration platform for continuous blood plasma protein extraction from whole blood during cardiac surgery," Lab Chip 11, pp. 2858–2868, 2011.
[9] S. Thorslund, O. Klett, F. Nikolajeff, K. Markides, J. Bergquist, "A hybrid poly (dimethylsiloxane) microsystem for on-chip whole blood filtration optimized for steroid screening," Biomed Microdevices 8, pp. 73–79, 2006.
[10] H. Lee, A. M. purdon, R. M. Westervelt, "Manipulation of biological cells using a microelectromagnet matrix," Physics Letters 85, pp.1063-1065, 2004.
[11] Y. F. Anne, S. Charles, S. Axel, H. A. Frances, R. Q. Stephen, "A microfabricated fluorescence-activated cell sorter," Nature biotechnology 17, pp. 1109-1111, 1999.
[12] I. Doh, Y. H. Cho, "A continuous cell separation chip using hydrodynamic dielectrophoresis (DEP) process," Sensor and Actuators A 121, pp. 59-65, 2005.
[13] X. B. Zhang, Z. Q. Wu, K. Wang, J. Zhu, J. J. Xu, X. H. Xia, H. Y. Chen, "Gravitational Sedimentation Induced Blood Delamination for Continuous Plasma Separation on a Microfluidics Chip," Anal. Chem. 84, pp. 3780−3786, 2012.
[14] T. Tachi, N. Kaji, M. Tokeshi, Y. Baba, "Simultaneous separation, metering, and dilution of plasma from human whole blood in a microfluidic system," Anal. Chem . 81, pp. 3194–3198, 2009.
[15] M. Yamada, M.Nakashima ,M. Seki, "Pinched Flow Fractionation: Continuous Size Separation of Particles Utilizing a Laminar Flow Profile in a Pinched Microchannel,"Anal. Chem. 76, pp. 5465-5471, 2004.
[16] S. Tripathi, A. Prabhakar, N. Kumar, S. G. Singh, A Agrawal, "Blood plasma separation in elevated dimension T-shaped microchannel," Biomedical microdevices, 15(3), pp.415-425, 2013.
[17] H. M. Ji, V. Samper, Y. Chen, C. K.Heng, T. M. Lim, L. Yobas, " Silicon-based microfilters for whole blood cell eparation," Biomed. Microdevices 10, pp. 251–257, 2008.
[18] Y. C. Kim, S. H. Kim, D. Kim, S. J. Park, J. K. Park, "Plasma extraction in a capillary-driven microfluidic device using surfactant-added poly (dimethylsiloxane) ," Sensors Actuators 145, pp. 861–868, 2010.
[19] Z. Geng, Y. Ju, Q. Wang, W. Wang, Z. Li, "Multi-component continuous separation chip composed of micropillar arrays in a split-level spiral channel," RSC Adv. 3, pp. 14798–14806, 2013.
[20] T. G. Kang, Y. J. Yoon, H. Ji, P. Y. Lim, Y. Chen, "A continuous flow micro filtration device for plasma/blood separation using submicron vertical pillar gap structures," J. Micromech. Microeng. 24, pp.1-5, 2014.
[21] J. M. Li, C. Liu, X. D. Dai, H. H. Chen, Y. Liang, H. L. Sun, H . Tian, X. P. Ding, "PMMA microfluidic devices with three-dimensional features for blood cell filtration," J. Micromech. Microeng. 18, pp. 1-7, 2008.
[22] J. N. Kuo,Y. H. Zhan, "Microfluidic chip for rapid and automatic extraction of plasma from whole human blood,"Microsyst Techno 21, pp. 255–261, 2015.
[23] C. K. Malek and V. Saile, "Applications of LIGA technology to precision manufacturing of high-aspect-ratio micro-components and -systems: a review," Microelectronics Journal 35, pp. 131-143, 2004.
[24] S. C. Terry, J. H. Jerman, and J. B. Angell, "A gas chromatographic air analyzer fabricated on a silicon wafer," Electron Devices, IEEE Transactions on 26, pp. 1880-1886, 1979.
[25] D. J. Harrison, A. Manz, Z. Fan, H. Luedi, and H. M. Widmer, "Capillary electrophoresis and sample injection systems integrated on a planar glass chip," Analytical Chemistry 64, pp. 1926-1932, 1992.
[26] C. H. Ahn, C. Jin-Woo, G. Beaucage, J. H. Nevin, L. Jeong-Bong, A. Puntambekar, et al., "Disposable smart lab on a chip for point-of-care clinical diagnostics, " Proceedings of the IEEE 92, pp. 154-173, 2004.
[27] P. Mela, A. van den Berg, Y. Fintschenko, E. B. Cummings, B. A. Simmons, and B. J. Kirby, "The zeta potential of cyclo-olefin polymer microchannels and its effects on insulative (electrodeless) dielectrophoresis particle trapping devices,"ELECTROPHORESIS 26, pp.1792-1799, 2005.
[28] Y. Yang, C. Li, J. Kameoka, K. H. Lee, and H. G. Craighead, "A polymeric microchip with integrated tips and in situ polymerized monolith for electrospray mass spectrometry," Lab on a Chip 5, pp. 869-876, 2005.
[29] M. Bua, T. Melvin, G.J. Ensell, J.S. Wilkinson, A.G.R. Evans, "A new masking technology for deep glass etching and its microfluidic application," Sensors and Actuators A, 115, pp.476-482, 2004.
[30] A. Berthold, P. M. Sarro, M.J. Vellekoop, "Two-step glass wet-etching for micro-fluidic devices," Proceedings of the SeSens workshop, 2000.
[31] L. Ceriottia, K. Weibleb, N.F. de Rooija, E. Verpoortea, "R ectangular channels for lab-on-a-chip applications," Microelectronic Engineering, 67-68, pp.865-871, 2003.
[32] D. Mijatovic, J.C.T. Eijkel, A. van den Berg, "Technologies for nanofluidic systems: top-down vs. bottom-up—a review," Lab chip, 5, pp.492-500, 2005.
[33] T.D. Boone, Z.H. Fan, H.H. Hooper, A.J. Ricco, H. Tan, S.J. Williams, "Plastic advances microfluidic devices," Anal. Chem., 74, pp. 78A-86A, 2002.
[34] L. Martynova, L.E. Locascio, M. Gaitan, G.W. Kramer, R.G. Christensen, W.A. MacCrehan, "Fabrication of Plastic Microfluid Channels by Imprinting Methods," Anal. Chem., 69, pp.4783-4789, 1997.
[35] H.Takaoa, K. Miyamurab, H. Ebib, M. Ashikia, K. Sawadaa, M. Ishidaa, "A MEMS microvalve with PDMS diaphragm and two-chamber configuration of thermo-pneumatic actuator for integrated blood test," Sensors and Actuators A, 119, pp.468-475, 2005.
[36] J. Melin, N. Roxhed, G. Gimenez, P. Griss, W. van der Wijngaart, G. Stemme, "A liquid-triggered liquid microvalve for on-chip flow control," Sensors and Actuators B, 100, pp.463-468, 2004.
[37] R.Pal, M. Yang, B.N. Johnson, D.T. Burke, M.A. Burns, "Phase Change Microvalve for Integrated Devices," Anal. Chem., 76, pp.3740-3748, 2004.
[38] P. Vulto, T. Huesgen, B. Albrecht, G. A. Urban, "A full-wafer fabrication process for glass microfluidic chips with integrated electroplated electrodes by direct bonding of dry film resist, " J. Micromech. Microeng., 19, 077001, 2009.
[39] B.J. Polk, A. Stelzenmuller, G. Mijares,W. MacCrehanb, M. Gaitan, "Ag/AgCl microelectrodes with improved stability for microfluidics," Sensors and Actuators B, 114, pp.239-247, 2006.
[40] E.T. Enikov, J.G. Boyd, "Electroplated electro-fluidic interconnects for chemical sensors," Sensors and Actuators, 84, pp.161-164, 2000.
[41] J.Y. Cheng, M.H. Yen, C.W. Wei, Y.C. Chuang ,T.H. Young," Crack-free direct-writing on glass using a low-power UV laser in the manufacture of a microfluidic chip," J. Micromech. Microeng, 15, pp.1147-1156, 2005.
[42] C.G.K. Malek, "Laser processing for bio-microfluidics applications (part II), " Anal Bioanal Chem, 385, pp.1362-1369, 2006.
[43] W.C. Jung, Y.M. Heo, G.S. Yoon, K.H. Shin, S.H. Chang, G.H. Kim, M.W. Cho," Micro Machining of Injection Mold Inserts for Fluidic Channel of Polymeric Biochips, " Sensors, 7, pp.1643-1654, 2007.
[44] D.S. Zhao, B. Roy, M.T. McCormick, W.G. Kuhr, S.A. Brazill, "Rapid fabrication of a poly(dimethylsiloxane) microfluidic capillary gel electrophoresis system utilizing high precision machining, " Lab chip, 3, pp.93-99, 2003.
[45] J.S. Mecombera, D. Hurdb, P.A. Limbach, "Enhanced machining of micron-scale features in microchip molding masters by CNC milling, " International Journal of Machine Tools & Manufacture, 45, pp.1542-1550, 2005.
[46] M.L. Huperta, W.J. Guya, S.D. Llopisa, C. Situmaa, S. Rania, D.E. Nikitopoulosa, S. A. Soper, "High-Precision Micromilling for Low-Cost Fabrication of Metal Mold Masters," Proc. of SPIE, 6112, pp.61120B1-12, 2005.
[47] M. Schilling, W. Nigge, A. Rudzinski, A. Neyerb, R. Hergenrödera, "A new on-chip ESI nozzle for coupling of MS with microfluidic devices, " Lab chip, 4, pp.220-224, 2004.
[48] G.S. Fiorini, D.T. Chiu, "Disposable microfluidic devices: fabrication, function, and application, " BioTechniques, 38, pp. 429-446, 2005.
[49] H. D. Rowland and W. P. King, "Polymer deformation and filling modes during microembossing", Journal of Micromechanics and Microengineering, 14, 1625, 2004.
[50] S. K. Sia and G. M. Whitesides,"Microfluidic devices fabricated in poly (dimethylsiloxane) for biological studies", Electrophoresis ,24,3563-3576, 2003.
[51] Y.-C. Su, J. Shah, and L. Lin, "Implementation and analysis of polymeric microstructure replication by micro injection molding", Journal of Micromechanics and Microengineering,14, 415, 2004.
[52] P.C. Chen, C.W. Pan, W.C. Lee, and K.M. Li, "An experimental study of micromilling parameters to manufacture microchannels on a PMMA substrate", The International Journal of Advanced Manufacturing Technology, 71, 1623-1630, 2014.
[53] M.L. Huperta, W.J. Guya, S.D. Llopisa, C. Situmaa, S. Rania, D.E. Nikitopoulosa, S. A. Soper,"High-Precision Micromilling for Low-Cost Fabrication of Metal Mold Masters", Proc. of SPIE, 6112, 61120B1-61120B 12, 2005.
[54] L. Tang and N. Y. Lee, "A facile route for irreversible bonding of plastic-PDMS hybrid microdevices at room temperature", Lab Chip, 10, 1274–1280,2010.
[55] 黃立政, 流體力學原理與應用. 台北市: 全華科技圖書股份有限公司, 2001.
[56] V. Liu, M. Patel and A. Lee, "A microfludic device for blood cell sorting and morphology analysis", 978-0-9798064-6-9/μTAS 2013.
[57] S. Tripathi, Y. V. Bala Varun Kumarl, A. Prabhakar, S. S. Joshi and A. Agrawal, "Performance study of microfluidic devices for blood plasma separation-a designer’s perspective", J. Micromech. Microeng. 25 , 2015.