本研究以簡單與低成本的製程技術製備高效能的氫氣感測元件，內文將分為三個部分。第一部分探討不同成長溶液濃度的氧化鋅奈米柱之氫氣感測及物性分析。接著在摻雜不同條件的石墨相氮化碳於氧化鋅奈米柱之氫氣感測及物性分析。第二部分則是將前述摻雜石墨相氮化碳的氧化鋅奈米柱成長於超奈米鑽石結構上，再做氫氣感測及物性分析。第三部分則是將第一部分結果成長於退火前後之氧化鎵結構上，再做氫氣感測及物性分析。此外，針對氫氣感測最好的試片，將其進行穩定性、重複性及選擇性量測。
研究發現，氧化鋅奈米柱在成長溶液濃度為35 mM時，由拉曼與XRD分析得知有較佳的結晶品質，在500 ppm的氫氣濃度下，響應值為12.7%。接著在水熱法中添加不同參數的石墨相氮化碳，後成長石墨相氮化碳複合氧化鋅奈米柱，響應值有所提升，在500 ppm的氫氣濃度下，響應值為23%。造成提升的因素為，因為氧化鋅與石墨相氮化碳的晶格參數不同，並且之間存在新的缺陷使得響應度獲得提升，將此結構複合於超奈米鑽石上，在500 ppm的氫氣濃度下，響應值為43.7%。響應值與穩定度皆有增加，因為超奈米鑽石這層釋放出大量的碳，因此吸附水平提高，使得石墨相氮化碳複合氧化鋅奈米柱的吸附能力和缺陷性質增加。
進一步研究，氧化鋅奈米柱在成長於氧化鎵結構上，在500 ppm的氫氣濃度下，響應值為16.3%。石墨相氮化碳於氧化鋅奈米柱/片在成長於氧化鎵結構上，在500 ppm的氫氣濃度下，響應值為18.7%。石墨相氮化碳於氧化鋅奈米柱/片在成長於退火後氧化鎵結構上，在500 ppm的氫氣濃度下，響應值為30%。因為奈米柱與奈米片表面積的增加，表面能快速的解離，使得更多的電子釋放到導帶響應值獲得提升，隨著摻雜石墨相氮化碳與氧化鎵退火後對於使得穩定性與衰退性獲得改善。超奈米鑽石整體響應對於氧化鎵較佳，是因為氧缺陷區所造成的影響，由OI/OIall比值可知Zn控制引入氧缺陷區的有效途徑，因此對於氫氣響應度高。

In this study, a structure of graphite carbon nitride (g-C3N4) doped zinc oxide nanorods (ZNR) was synthesized using a simple and cost-effective method. Through this method, g-C3N4 were successfully doped with ZNR. Various analyses were used to confirm the successful formation of the gCN-ZNR structure. The hydrogen sensing properties of gCN-ZNR were investigated, which shows that remarkably improved H2 sensing performances for gCN doped ZNR.Then, this structure is combined with the ultra-nanodiamonds (N-UNCD), which improved H2 sensing performances and the stability. The gCN-ZNR/N-UNCD based H2 sensor shows the good response of 43.7% since the N-UNCD layer releases a large amount of carbon, which increases the adsorption capacity for the gCN-ZNR structure.
Then the gCN-ZNR structure grown on Ga2O3 film(gCN-ZNR/Ga2O3) and the gCN-ZNR structure grown on annealed Ga2O3 film(gCN-ZNR/Ga2O3 A) were studied. It was found that the nanorods and nanosheets structure effectively increased the surface area that provides more active sites, which leads to the rapid gas adsorption/desorption, thereby exhibit a higher response for both of the gCN-ZNR/Ga2O3 and gCN-ZNR/Ga2O3 A samples. Moreover, the stability and decay properties are improved for the gCN-ZNR/Ga2O3 A samples.
In summary, the response value(43.7%) of gCN-ZNR/N-UNCD is better than that of gCN-ZNR/Ga2O3 A(30.0%) since the ratio of OI/OIall (the concentration of oxygen vacancy) is higher for gCN-ZNR/N-UNCD samples. This studies shows promising hybrid nanostructures for future hygrogen sensor applications.

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