TFT-LCD製程包括三個部份：陣列製程(Array)、液晶注入製程(Cell)以及模組製程(Module)，而在前兩部份的玻璃基板製程中，在玻璃基板被塗佈、蝕刻等表面處理後，會有洗淨的程序然後乾燥，乾燥端如果無法乾燥完全，則玻璃基板就無法使用。本文將針對TFT-LCD玻璃基板乾燥設備內部之流場做探討改善，利用計算流體力學分析軟體建構實體的數值模型，並且依照實際的情況設定其環境邊界條件，最後經由計算迭代求解得到TFT-LCD玻璃基板乾燥箱體內部之流場。由數值模擬的結果發現，原始設計中加裝抽風罩是為避免異物的進入，卻造成箱體內部產生廻流；而抽風口位置也不甚理想，無法有效將濕氣排出。另外風刀出口速度太大，撞擊壁邊造成流體反彈形成廻流。本研究依據這些流場之物理現象，設計一套改善原本箱體內部設計之方法。先移除抽風罩來改變箱體內部氣流流動的方向，以破壞廻流的產生，之後將風刀出口速度做變化搭配找出一組最佳操作組合；接下來嘗試改變抽風口位置與減少不必要抽風口，使得箱體內部氣流更容易帶走，最後在控制TFT-LCD玻璃基板乾燥箱體內部溼度在安全範圍之下降低抽風量以節省成本。本研究之完成對於TFT-LCD玻璃基板乾燥設備之設計，可以作為改善的參考依據。

The manufacturing process of TFT-LCD consists of three portions: array, cell, and module. The glass substrate will be coated, etched, washed, and dried several times in the first two processes. In fact, the glass substrate becomes a defective product if it was not dried off completely. Therefore, designing the drying module for LCD glass substrate is an important and challenging task for TFT-LCD industry and thus becomes the topic of this research. With expectation of exploring further improvement, CFD code Star-CD is utilized to simulate the flow fields inside a typical drying module incorporated with boundary conditions based on the practical situation. At first, numerical result reveals that the cover of the air exhauster has caused reversed flow and recirculation inside the chamber, although it was primarily designed to avoid any objects entering from outside. In addition, the incorrect location of the exhauster can not efficiently draw the humid airflow out to the exterior environment. Also, the airflow from wind knife was so strong that the collision of the air stream against the glass substrate and wall created serious rebound flow and reversed flow patterns. Thereafter, based on the above phenomena, reducing the air speed at water knife’s outlet and readjusting the exhauster’s location are introduced to improve the original design. The new exhausting system is featured with removing the exhauster cover and the adjustments on quantity and distribution of exhausters. Trough an extensive simulation work, it is demonstrated that removing the exhauster cover can change the airflow direction and destroy the circulation generation. By means of reducing the unnecessary air outlets and readjusting exhauster’s location, the humid airflow is expelled from the drying module smoothly. Moreover, the operating cost down is achieved via a lower air speed at water knife’s outlet when the humidity of the drying model is under the safety control. In conclusion, this study offers an important guideline for the improvement of designing the glass substrate’s drying model.

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