近年來隨著自動駕駛車的發展，對於感測器的需求漸增，利用矽光子 技術實現全固態式光學雷達，可利用矽光子低功耗、可積體化等特性，以 及光學雷達具高解析度及較大掃描角的優點，在此應用領域具極大的優 勢及未來展望。
此晶片以次波長波導的光學天線陣列達到均勻出光，經過驗證，光學 波導方向上的光束發散角約 0.165 度。在相位修正方面，我們將連接天線 的相移器安排成樹狀多級結構，以利與群組相位修正技術結合，每一級皆 由兩個電極來控制左右的波導，以減少晶片的電極，並且在經過四級的相 位修正後，其 PSLL 可以來到 5.6 分貝。我們著重於探討熱效應對於晶片 的影響，透過使用短脈衝來調整相位，可以降低熱效應對鄰近光學開關及 光學相位陣列的串擾，使熱相移器可以操作在較大的驅動電壓。
本論文也著重在量測平台的改良，原量測平台受限於角度而無法量測 較大散射角的遠場，設計新的遠場量測平台，使紅外光照相機可以晶片原 中心做轉動，實現較大角度的遠場量測。

In recent years, with the development of autonomous vehicles, the demand for optical sensors has been increasing. The silicon photonics technology used to realize solid-state optical radar has become advantageous in this field due to its low power consumption, integration capabilities, as well as the high resolution and larger scanning angles provided by optical radar.
In this chip, the optical antenna array with subwavelength waveguide gratings enhances the emission uniformity and reduce the beam divergent angle. The experimental results demonstrate a beam divergence angle of approximately 0.165 degrees in the optical waveguide direction. In terms of phase correction, we arrange the phase shifters connecting to the optical antennas into a multi-stage tree structure, where two electrodes are used to control the phase shifters at each stage, in order to reduce the number of electrodes on the chip. After four stages of phase error correction, the peak side lobe level (PSLL) reaches 5.6 dB. We also focus on exploring the impact of thermal effects on the phase tuning. By using short pulses to tune the phases, the thermal crosstalk can be suppressed, so the phase tuning can be maintained for a higher tuning voltage.
This thesis also focuses on improving the measurement platform by designing a new far-field measurement platform. In the previous measurement setup, the measurable beam steering angle of the far-field was limited to a few degrees. The infrared camera can rotate around the center of the chip in the new stage, and a larger far-field angle can be measured.

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