傳統的全像術曝光系統因其反射鏡限制了其週期大小與曝光面積，為了克服此問題，本論文採用兩條光纖取代原有的反射鏡及擴束器，並利用光纖可彎曲的特性，改良全像干涉曝光系統的光路，使其曝光面積較不受干涉圖案週期的影響。而為了更簡化製程，本論文另外設計出改良式Lloyd’s mirror製具夾角從原本的90°變成55°，主要應用於特定的大週期，製作不同週期的樣品只需單一轉軸，簡化全像術曝光系統，並利用新式全像術系統製作二維週期性結構，且利用濕式蝕刻製作出週期性的孔洞和椎狀柱的圖案。

The periodic structure realized with conventional Lloyd’s Mirror interference lithography system has limitation on its period and exposure area due to the geometric structure. To overcome the problem, this thesis instigates the formation of long-period gratings by replacing the original reflective mirror and beam expander with two fibers. The optical path of the holography exposure system can be simplified by utilizing the flexible characteristic of fibers. This scheme can also be utilized to form long-period interference patterns over relatively large exposure area. For realizing long period patterns, we also propose an improved Lloyd's mirror, in which the angle between the mirror plate and sample plate is changed from 90° to 55°. Only single-axis tuning is required for changing the period of the interference patterns. This can greatly simplify the optical exposure of periodic patterns. The system is used to fabricate one- and two-dimensional periodic structures; and wet etching is then applied to obtain periodic patterns of holes and cone pillars.

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