研究生: |
吳偉泓 Wei-Hung Wu |
---|---|
論文名稱: |
新式全曝光系統涉及應用 Design of novel interference lithography systems |
指導教授: |
李三良
San-Liang Lee |
口試委員: |
徐世祥
Shih-Hsiang Hsu 洪勇智 Yung-Jr Hung 何文章 Wen-Jeng Ho |
學位類別: |
碩士 Master |
系所名稱: |
電資學院 - 光電工程研究所 Graduate Institute of Electro-Optical Engineering |
論文出版年: | 2016 |
畢業學年度: | 104 |
語文別: | 中文 |
論文頁數: | 87 |
中文關鍵詞: | 全像術曝光 、全像術曝光系統 、週期性結構蝕刻 |
外文關鍵詞: | Interference lithography system, The periodic structures by using etching. |
相關次數: | 點閱:236 下載:4 |
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傳統的全像術曝光系統因其反射鏡限制了其週期大小與曝光面積,為了克服此問題,本論文採用兩條光纖取代原有的反射鏡及擴束器,並利用光纖可彎曲的特性,改良全像干涉曝光系統的光路,使其曝光面積較不受干涉圖案週期的影響。而為了更簡化製程,本論文另外設計出改良式Lloyd’s mirror製具夾角從原本的90°變成55°,主要應用於特定的大週期,製作不同週期的樣品只需單一轉軸,簡化全像術曝光系統,並利用新式全像術系統製作二維週期性結構,且利用濕式蝕刻製作出週期性的孔洞和椎狀柱的圖案。
The periodic structure realized with conventional Lloyd’s Mirror interference lithography system has limitation on its period and exposure area due to the geometric structure. To overcome the problem, this thesis instigates the formation of long-period gratings by replacing the original reflective mirror and beam expander with two fibers. The optical path of the holography exposure system can be simplified by utilizing the flexible characteristic of fibers. This scheme can also be utilized to form long-period interference patterns over relatively large exposure area. For realizing long period patterns, we also propose an improved Lloyd's mirror, in which the angle between the mirror plate and sample plate is changed from 90° to 55°. Only single-axis tuning is required for changing the period of the interference patterns. This can greatly simplify the optical exposure of periodic patterns. The system is used to fabricate one- and two-dimensional periodic structures; and wet etching is then applied to obtain periodic patterns of holes and cone pillars.
[1] Yung-Jr Hung, San-Liang Lee, and Yen-Ting Pan, "Photonic bandgap analysis of photonic crystal slabs with elliptical holes and their formation with laser holography," Journal of Optics, vol. 12, no. 1, pp. 1030-1038, 2010.
[2] Yung-Jr Hung, San-Liang Lee, Kai-Chung Wu, Yian Tai, and Yen-Ting Pan, "Antireflective silicon surface with vertical aligned silicon nanowires realized by simple wet chemical etching processes," Optics Express, vol. 19, no. 17, pp. 15792-15802, August 15, 2011.
[3] Johannes de Boor, Nadine Geyer, Jorg V Wittemann, Ulrich Gosele, and Volker Schmidt, "Sub-100 nm silicon nanowires by laser interference lithography and metal-assisted etching," Nanotechnology, vol. 21, no. 9, pp. 095302-1–095302-5, 2010.
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[5] Yoshio Honda, Norifumi Kameshiro, Masahito Yamaguchi, and Nobuhiko Sawaki, "Growth of (1101) GaN on a 7-degree off-oriented (001) Si substrate by selective MOVPE," J. Crystal Growth, vol. 242, pp. 82-86, 2002.
[6] Ling Lee, Kun-Feng Chien, Wu-Ching Chou, Chih-Hsin Ko, Cheng-Hsien Wu, You-Ru Lin, Cheng-Tien Wan, Clement H. Wann, Chao-Wei Hsu, Yung-Feng Chen and Yan-Kuin Su, " Improvement of defect reduction in semi-polar GaN grown on shallow-trenched Si(001) substrate," Journal of CrystEngComm, vol. 14, pp. 4486-4489, 2012.
[7] 歐宗哲, "高分子液晶薄膜作為全像紀錄感光材料之研究," 碩士論文, 國立中山大學, 2009.
[8] Yung-Jr Hung, San-Liang Lee, and Yen-Ting Pan, "Holographic realization of hexagonal two dimensional photonic crystal structures with elliptical geometry" Journal of Vacuum Science & Technology B , vol. 28, No. 5, pp.1030-1038, 2010.
[9] Weidong Mao, Ishan Wathuthanthri, and Chang-Hwan Choi "Tunable two-mirror laser interference lithography system for large-area nano-patterning," Proc. SPIE, vol. 7970, pp. 79701K-1–79701K-8, 2011.
[10] En-Chiang Chang, Yi-Lin Sun, Pao-Te Lin, David G. Mikolas, and Chien-Chung Fu "Lloyd’s Mirror Interference Lithography Using a Single Mode Fiber Spatial Filter" Journal of Vaccum Science Technology B, vol. 31, no. 2, pp. 021604-1–095302-6, 2013.
[11] 洪勇智, "全像二維光子晶體之研究及應用," 博士學位論文, 國立台灣科技大學電子工程系, 2010.
[12] Chul-Jong Chung, Student Member, IEEE and Ahmad Safaai-Jazi, Senior Member, IEEE, "Narrow-band spectral filter made of W-index and step-index fibers," Journal of Lightwave Technology, vol. 10 , pp.42 -45, 1992.
[13] 陳柏穎, "矽晶圓非等向性濕式蝕刻特性研究," 碩士論文, 國立中山大學機械與機電工程研究所, 2003.